Hide Advanced Options
Courses - Spring 2023
Engineering, Materials Department Site
(Perm Req)
Advanced Nano Processing of Materials with Plasma
Credits: 3
Grad Meth: Reg, Aud, S-F
Restriction: Permission of ENGR-Materials Science & Engineering department.
Credit only granted for: ENMA440, ENMA489P, ENMA698P, or ENMA640.
Formerly: ENMA698P.
Plasmas are used to control the micro-and Nanoscale level structure of materials including patterning at the micro-and nanoscale level using plasma etching techniques. The course establishes the scientific understanding required for the efficient production of nano-structure using plasma techniques.