Restriction: Permission of ENGR-Materials Science & Engineering department.
Credit only granted for: ENMA440, ENMA489P, ENMA698P, or ENMA640.
Formerly: ENMA698P.
Plasmas are used to control the micro-and Nanoscale level structure of materials including patterning at the micro-and nanoscale level using plasma etching techniques. The course establishes the scientific understanding required for the efficient production of nano-structure using plasma techniques.