Hide Advanced Options
Courses - Fall 2024
ENEE
Electrical & Computer Engineering Department Site
Open Seats as of
11/09/2024 at 05:30 PM
ENEE416
(Perm Req)
Integrated Circuit Fabrication Laboratory
Credits: 3
Grad Meth: Reg
Prerequisite: Minimum grade of C- in ENEE303 or ENEE304; and must have earned a minimum grade of regular (letter) C- in all required 200-level ENEE courses.
Restriction: Must be in one of the following programs (Engineering: Computer; Engineering: Electrical), and permission of ENGR-Electrical & Computer Engineering department.
Characterization of wafers and fabrication steps. Oxide growth, lithography, dopant diffusion, and metal deposition and patterning will be discussed in the lectures and carried out in the lab in fabricating NMOS transistor circuits. The transistor characteristics will be measured and related to the fabrication parameters.